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Hydrogen Chloride Anhydrous Liquid 5.0N CAS No.:7647-01-0
1. Basic Information
2. Product Properties
3. Application
It is used in large - scale integrated circuit production, such as epitaxial wafer vapor phase polishing and epitaxial substrate etching.
4. Safety Information
5. Steel Cylinder and Valve Details
Steel Cylinder
Valve
6. Product Specifications
Impurity Content (1×10⁻⁶)
| Component | Standard Value (GB/T24469 - 2009) | Detection Instrument | Detection Limit |
|---|---|---|---|
| Nitrogen (N₂) | ≤2.00 | DID Chromatograph | 0.01 |
| Hydrogen + Argon (H₂ + Ar) | ≤1.00 | DID Chromatograph | 0.01 |
| Methane + Acetylene (CH₄ + C₂H₂) | ≤1.00 | DID Chromatograph | 0.01 |
| Carbon Monoxide (CO) | ≤2.00 | DID Chromatograph | 0.01 |
| Carbon Dioxide (CO₂) | ≤2.00 | DID Chromatograph | 0.01 |
| Water (H₂O) | ≤1.00 | Optical Cavity Ring - down Spectrometer | 0.001 |
Metal Ion Content (1×10⁻⁶)
| Metal Ion | Standard Value | Detection Instrument | Detection Limit |
|---|---|---|---|
| Iron (Fe) | ≤0.50 | Plasma Emission Spectrometer | 0.001 |
| Nickel (Ni) | ≤0.10 | Plasma Emission Spectrometer | 0.001 |
| Copper (Cu) | ≤0.10 | Plasma Emission Spectrometer | 0.001 |
| Cobalt (Co) | ≤0.10 | Plasma Emission Spectrometer | 0.001 |
| Manganese (Mn) | ≤0.10 | Plasma Emission Spectrometer | 0.001 |
| Chromium (Cr) | ≤0.10 | Plasma Emission Spectrometer | 0.001 |
7. Contact Information
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